Tadesse, G.K.G.K.TadesseKlas, R.R.KlasDemmler, S.S.DemmlerHädrich, S.S.HädrichWahyutama, I.I.WahyutamaSteinert, M.M.SteinertSpielmann, C.C.SpielmannZürch, M.M.ZürchPertsch, T.T.PertschTünnermann, A.A.TünnermannLimpert, J.J.LimpertRothhardt, J.J.Rothhardt2022-03-052022-03-052016https://publica.fraunhofer.de/handle/publica/24869110.1364/OL.41.0051702-s2.0-84995554924We present a table-top coherent diffractive imaging (CDI) experiment based on high-order harmonics generated at 18 nm by a high average power femtosecond fiber laser system. The high photon flux, narrow spectral bandwidth, and high degree of spatial coherence allow for ultrahigh subwavelength resolution imaging at a high numerical aperture. Our experiments demonstrate a half-pitch resolution of 15 nm, close to the actual Abbe limit of 12 nm, which is the highest resolution achieved from any table-top extreme ultraviolet (XUV) or x-ray microscope. In addition, sub-30 nm resolution was achieved with only 3 s of integration time, bringing live diffractive imaging and three-dimensional tomography on the nanoscale one step closer to reality. The current resolution is solely limited by the wavelength and the detector size. Thus, table-top nanoscopes with only a few-nanometer resolutions are in reach and will find applications in many areas of science and technology.en535journal article