Barth, StephanStephanBarthBartzsch, HagenHagenBartzschHärter, H.H.Härter2022-03-052022-03-052015https://publica.fraunhofer.de/handle/publica/241624Autonomous sensors and smaller mobile electronics systems will become more important in the future of the Internet of Things. We introduce more efficient materials and production processes.en621Deposition of piezoelectric films for energy harvestingjournal article