Lorenz, J.J.Lorenz2022-03-082022-03-081989https://publica.fraunhofer.de/handle/publica/316759Since the publication of the first one-dimensional process simulation programs, increasing activities have been carried out in the development and improvement of the physical models involved and the development of more general programs which may be used for simulations in two or three dimensions. In this paper, some aspects of recent work carried out at FhG-AIS are discussed.endiffusionion implantationIonenimplantationlateral distributionlaterale VerteilungoxidationPhosphordiffusionphosphorus diffusionprocess simulationProzeßsimulation670620530conference paper