Müller-Sebert, W.W.Müller-SebertEckermann, ThomasThomasEckermannKoidl, P.P.KoidlWild, C.C.Wild2022-03-082022-03-081991https://publica.fraunhofer.de/handle/publica/318965The applicability of CVD diamond films in optics is investigated. Emphasis is put on the role of the surface roughness as the most critical parameter influencing the optical quality of polycrystalline diamond films. In particular we report on the preparation of optically smooth, thin diamond films, on the in situ analysis of the optical quality, on the coating of large area substrates, and on the growth of thick, free-standing diamond wafers with flat surfaces.enin-situ characterizationin-situ Charakterisierungoptical applicationoptical propertyoptische Anwendungoptische Eigenschaftpolycrystalline diamondpolykristalliner DiamantscatteringStreuungTexturtexture621667conference paper