Knieling, T.T.KnielingLaske, N.N.LaskeRasmusssen, M.M.RasmusssenSamson, J.J.SamsonMuehler, T.T.MuehlerBehrendt-Fryda, B.B.Behrendt-FrydaBlohm, L.L.BlohmNebling, E.E.Nebling2022-03-142022-03-142019https://publica.fraunhofer.de/handle/publica/410818The public funded project "Mikroozon" aims at developing a small device to generate ozone-rich water for sanitizing purposes, e.g. in household applications. In order to build an affordable system, innovative diamond-coated electrodes are combined with a low-cost multi-sensor chip. The sensor measures the upstream water flow quality and the electronic signals are led to an open-loop control circuit which controls the electrodes activity. Sensors and electrodes are fabricated using thin-film and micro-machining processes.en621conference paper