Diener, K.-H.K.-H.DienerReitz, S.S.ReitzSchneider, P.P.SchneiderBrokmann, G.G.BrokmannÜbensee, H.H.Übensee2022-03-102022-03-102005https://publica.fraunhofer.de/handle/publica/34856710.1109/ICSENS.2005.1597941Up to now the behavioral analysis of piezo-resistive pressure sensors by modeling and simulation has been performed on different levels of abstraction and has mainly been focused on piezo-resistive effect itself. In many cases integrated pressure sensors have to meet high demands regarding their technical specifications (sensitivity, linearity, bursting strength, etc.) The presented work aims at a comprehensive modeling of importand physical effects including parasitics using a behavioral description language. A modular modeling flow was defined and implemented.en621004conference paper