Kohlmann, K.T.K.T.KohlmannBrünger, W.H.W.H.Brünger2022-03-082022-03-081992https://publica.fraunhofer.de/handle/publica/319683E-beam induced deposition of metal from a metal organic gas has been used for the formation of microstructures of various geometries. Three examples: line deposition, needle growth and bridge formation have been selected for demonstration. Important parameters of the W deposition process from W(CO)sub6 gas are given like minimum feature size, positional accuracy and growth rate.en621conference paper