PSM-X2: Polysilicon surface micromachining process platform for vacuum-packaged sensors

Merz, P.P.MerzReinert, W.W.ReinertReimer, K.K.ReimerWagner, B.B.Wagner2022-03-102022-03-102005https://publica.fraunhofer.de/handle/publica/349686de621PSM-X2: Polysilicon surface micromachining process platform for vacuum-packaged sensorsconference paper