Jantz, W.W.JantzStibal, R.R.Stibal2022-03-032022-03-031993https://publica.fraunhofer.de/handle/publica/18266810.1016/0961-1290(93)90178-QHigh substrate resistivity is an important competitive asset of Ill-V semiconductors. It enhances the performance of ultrafast microelectronic and optoelectronic circuits. For a thorough on-line wafer quality control, a superior measurement system is required to evaluate resistivity fast, nondestructively and with high lateral resolution.enGaAsInPresistivityspezifischer WiderstandTopographietopography621667537journal article