Laudon, M.2022-03-022022-03-022013978-1-4822-0584-81-4822-0579-3978-1-4822-0579-4978-1-4822-0604-3https://publica.fraunhofer.de/handle/publica/155695NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2013. Technical proceedings. Vol.2: Nanotechnology 2013: Electronics, devices, fabrication, MEMS, fluidics and computational