Schmittgens, R.R.SchmittgensHolst, E.E.HolstGerlach, G.G.GerlachBartzsch, H.H.BartzschGlöß, D.D.GlößMaicu, M.M.MaicuFrach, P.P.Frach2022-03-112022-03-112012https://publica.fraunhofer.de/handle/publica/376395enPECVDnanocompositeabsorber620667670A novel nanoparticle source for vacuum depositionconference paper