CC BY 4.0Hwang, Jeong-YeonJeong-YeonHwangRaschdorf, PaulPaulRaschdorfHenschke, AndreAndreHenschkeLigges, ManuelManuelLiggesWeyer, SaraSaraWeyerGu-Stoppel, ShanshanShanshanGu-Stoppel2024-04-022024-04-022024-03-28https://publica.fraunhofer.de/handle/publica/464595https://doi.org/10.24406/publica-286310.3390/proceedings202409711210.24406/publica-2863This paper presents the optical system design for the MEMS mirror-based SPAD LiDAR system. The transmitter of the proposed LiDAR system consists of related optics for incident beam expansion and a piezoelectric MEMS mirror for a wide-scanning field of view. For the receiver unit, an SPAD array is utilized to collect the laser beam reflected from the target objects at a smart factory. The optical system of the proposed LiDAR system is presented, designed, and analyzed in various ways.enlight detection and ranging (LiDAR)microelectromechanical systems (MEMS) mirrorsingle-photon avalanche diode (SPAD)optical designlaser beam scanningjournal article