Hu, X.X.HuSchuster, JörgJörgSchusterSchulz, Stefan E.Stefan E.SchulzGeßner, ThomasThomasGeßner2022-03-122022-03-122014https://publica.fraunhofer.de/handle/publica/386365enSimulation of ALD chemistry of copper metalorganic precursors on Ta(110) Surfaceconference paper