Kriele, A.A.KrieleWilliams, O.A.O.A.WilliamsWolfer, M.M.WolferBrink, D.D.BrinkMüller-Sebert, W.W.Müller-SebertNebel, C.E.C.E.Nebel2022-03-042022-03-042009https://publica.fraunhofer.de/handle/publica/21890310.1063/1.31835342-s2.0-67651250914Nanocrystalline diamond (NCD) membranes of 150 nm thickness and diameters in the millimeter range grown by microwave-assisted chemical-vapor deposition were bulged to investigate their mechanical properties and their use as tuneable optical lenses. The NCD films were grown at different CH(ind 4)/H(ind 2) gas mixtures to vary the sp(exp 2)/sp(exp 3) ratio and thereby to tune their mechanical, optical, and surface morphology properties. By applying gas over pressure the membrane forms a lens shaped geometry. From deflection data we calculated Young's moduli which decrease with increasing CH(ind 4)/H(ind 2) ratio from 1160 GPa at 0.5% to 900 GPa at 7%. Optical lens applications show a variation in the focal point from infinity to 3.5 mm. The data indicate that NCD is a promising material for tuneable optical lenses applications.ennanodiamondYoung's modulustuneable microopticsmembraneNanodiamantYoung Moduleinstellbare Mikrooptik667621journal article