Heber, J.J.HeberMühlig, C.C.MühligTriebel, W.W.TriebelDanz, N.N.DanzThielsch, R.R.ThielschKaiser, N.N.KaiserLewis, K.L.K.L.LewisSoileau, M.J.M.J.SoileauStolz, C.J.C.J.Stolz2022-03-092022-03-092003https://publica.fraunhofer.de/handle/publica/34365110.1117/12.472391Luminescence measurements have been set up in order to study the interaction of UV-laser radiation with dielectric thin films. The pulsed laser excitation was carried out at 193-nm (6.4eV), the coating materials compr ised wide-band-gap oxides and fluorides. Experiments show the significant optical response of single- and multilayer coatings on the low fluence excitation at sub-band-gap energy. Time- and spectrally-resolved measurements indicate characteristic emission bands of color centers in the deep-UV and vacuum-UV coating materials. An a signment of these optical transitions can be derived from the comparison with known bulk-material studies.enluminescenceUV thin filmcolor centers193 nm620conference paper