Gatto, A.A.GattoYang, M.M.YangKaiser, N.N.KaiserSchmidt, J.U.J.U.SchmidtSandner, T.T.SandnerSchenk, H.H.SchenkLakner, H.H.LaknerHeber, J.J.Heber2022-03-032022-03-032006https://publica.fraunhofer.de/handle/publica/21094010.1364/AO.45.001602High-performance coatings for micromechanical mirrors were developed. The high-reflective metal systems can be integrated into the technology of MOEMS, such as spatial light modulators and microscanning mirrors from the near-infrared down to the vacuum-ultraviolet spectral regions. The reported metal designs permit high optical performances to be merged with suitable mechanical properties and fitting complementary metal-oxide semiconductor compatibility.encoatingMOEMSmicromechanical mirror620535journal article