So, Y.-H.Y.-H.SoStark, E.J.E.J.StarkLi, Y.Y.LiKisting, S.S.KistingAchen, A.A.AchenBaranek, K.K.BaranekScheck, D.D.ScheckHetzner, J.J.HetznerFolkenroth, J.J.J.J.FolkenrothTöpper, M.M.TöpperBaumgartner, T.T.Baumgartner2022-03-032022-03-032006https://publica.fraunhofer.de/handle/publica/21149710.1109/TADVP.2006.884840A positive-tone and aqueous-base-developable benzocyclobutene (BCB)-based dielectric material curable in air is described in this paper. The prepolymer is made from divinylsiloxane bisbenzocyclobutene (DVS-bisBCB) and BCB-acrylic acid. The formulation contains antioxidants that allow the prepolymer to cure in air and a diazonaphthaquinone to make it photosensitive. Patterned films have high resolution, and via openings are scum-free without a descum operation. Whether cured in nitrogen or in air, the prepolymer produces a film with optical, electrical, thermal, and mechanical properties desirable for many microelectronic applications, such as packaging applications and as a planarization or insulation layer in display applications.en621journal article