Ponte, R.R.PonteGiagka, V.V.GiagkaSerdijn, W.A.W.A.Serdijn2022-03-142022-03-142018https://publica.fraunhofer.de/handle/publica/40718510.1109/BIOCAS.2018.85848342-s2.0-85060886772This paper reports on the design and fabrication of a time-mode signal-processing in situ temperature sensor customized for an organ-on-a-chip (OOC) application. The circuit was fabricated using an in-house integrated circuit (IC) technology that requires only seven lithographic steps and is compatible with MEMS fabrication process. The proposed circuit is developed to provide the first out-of-incubator temperature monitoring of cell cultures on an OOC platform in a monolithic fabrication. Measurement results on wafer reveal a temperature measurement resolution of less than ±0.2 °C (3s) and a maximum nonlinearity error of less than 0.3% across a temperature range from 25 °C to 100 °C.en621conference paper