Dellwo, U.U.DellwoKeller, P.P.KellerMeyer, J.-U.J.-U.Meyer2022-03-032022-03-031997https://publica.fraunhofer.de/handle/publica/19029810.1016/S0924-4247(97)80278-6A low-cost humidity sensor in thick-film technology has been developed based on MnWO4, In this paper, effects of preparation parameters and influences of additives on the sensor properties and membrane composition are described. Measurements of the sensor impedance are presented as a function of humidity.enDickfilm-FeuchtsensorFeuchtsensorhumidity sensorMnWO4thick-film humidity sensor610620537Fabrication and analysis of a thick-film humidity sensor based on MnWO4journal article