Krebs, C.C.KrebsRubart, J.J.RubartHommes, A.A.HommesBrauns, R.R.BraunsNüßler, D.D.Nüßler2022-03-112022-03-112010https://publica.fraunhofer.de/handle/publica/37004410.1109/ICIMW.2010.5613004The characterization of materials is one major task for systems which work e.g. in the field of quality or production control. One factor to analyze material volume information is the permittivity. The following paper describes a measurement method to determine and gives an overview about the measurement system. In addition first measurement results will be shown.en621High resolution measurements to determine the permittivity in artificial structuresconference paper