Wagner, B.B.WagnerReimer, K.K.ReimerMaciossek, A.A.MaciossekHofmann, U.U.Hofmann2022-03-092022-03-091997https://publica.fraunhofer.de/handle/publica/32843610.1109/SENSOR.1997.613585The paper presents a technological study for the realization of micromirrors which have both, a large pixel size (100 mu m*100 mu m) and a large mirror deflection angle (+or-15 degrees ). This specification requires a 13 mu m gap for electrostatic actuation. A metal surface micromachining process has been developed using thick resist UV- lithography, multiple electroplating, a copper sacrificial layer and a polishing process step. Using nonplanar electrodes the driving voltage of electrostatic actuators can be reduced by factors. Two different technologies to realize tapered electrodes are presented.encopperelectroplatingelectrostatic deviceintegrated opticslithographymicroactuatormicromachiningmirrorpolishing621conference paper