Sharon, AndreAndreSharonBilsing, AxelAxelBilsingLewis, GordonGordonLewis2022-03-092022-03-092001https://publica.fraunhofer.de/handle/publica/338604This paper introduces a new microfabrication technique that combines ultraprecision micro machining (Milling, turning, drilling, and grinding) with sacrifical/structural multi-layer manufacturing processes to produce assembled, three-dimensional microsystems. These systems can comprise true 3-dimensional features that span in size from micrometers through millimeters and can be manufactured from a variety of metallic and polymer materials.enMikrobearbeitungMEMSUPSAMS670658conference paper