Koch, Sandro G.Sandro G.KochVölz, UweUweVölzLange, NicolasNicolasLangeKöble, SörenSörenKöbleSchubert, F.F.SchubertRichter, F.F.RichterPoongodan, P.K .P.K .PoongodanVanselow, F.F.VanselowUrbahn, C.C.Urbahn2022-03-152022-03-152021https://publica.fraunhofer.de/handle/publica/41279110.1109/SSI52265.2021.9467023A new technology platform is presented that utilized capacitive micromachined ultrasonic transducers (CMUT) for the on-chip integration of proximity and tactile sensing. This platform integrated in robotic grippers enables tactile and reactive grasping. A single channel proximity system is demonstrated to distinguish objects and reveal high spatial resolution to distances of 10 mm.enultrasonic transducerssystem integrationgraspingrobot sensing systemsensor systemSystem-on-chipsensor670621620621666conference paper