Jakobs, S.S.JakobsSchulz, U.U.SchulzDuparre, A.A.DuparreKaiser, N.N.Kaiser2022-03-032022-03-031997https://publica.fraunhofer.de/handle/publica/19005010.1007/s002160050395SiO2 protective coatings have been deposited on polycarbonate substrates by plasma ion assisted deposition. The influence of ion energy on the water permeability and the surface toptgraphy of the coatings was studied by infrared spectroscopy and atomic force microscopy. Coatings deposited at sufficiently high ion energies show a barrier effect against moisture uptake and considerably reduced film roughness. Both effects are attributed to an increase of the packing densities of the coatings.enatomic force microscopeDünne optische SchichtLichtstreuunglight scatteringOberflächenrauheitoptical thin filmsRasterkraftmikroskopiesurface roughness620journal article