Reliability of ultra-thin N2O-nitrided oxides grown by RTP under low-pressure in different gas atmospheres

Beichele, M.M.BeicheleBauer, A.J.A.J.BauerHerden, M.M.HerdenRyssel, H.H.Ryssel2022-03-032022-03-032001https://publica.fraunhofer.de/handle/publica/19890310.1016/S0038-1101(01)00061-2en670620530537Reliability of ultra-thin N2O-nitrided oxides grown by RTP under low-pressure in different gas atmospheresjournal article