Asmussen, J.J.AsmussenGrotjohn, T.A.T.A.GrotjohnSchuelke, T.T.Schuelke2022-03-042022-03-042012https://publica.fraunhofer.de/handle/publica/23144110.1016/B978-1-4377-3465-2.00002-52-s2.0-84902028524enAdvances in plasma synthesis of UNCD filmsbook article