Hofmann, UlrichUlrichHofmannSenger, FrankFrankSenger2022-03-082022-03-082015https://publica.fraunhofer.de/handle/publica/310607The invention relates to a micro-mirror assembly, comprising a mirror plate (2) fastened to a substrate by means of spring elements, wherein a drive unit (9, 10) is associated with the mirror plate, which drive unit is designed to drive the mirror plate about at least one axis such that the mirror plate oscillates about said axis. The spring elements are designed as a plurality of spring ring frames (3) that surround the mirror plate (2) substantially in the mirror plate plane of the mirror plate, wherein the innermost spring ring frame (3) adjacent to the mirror plate (2) is connected to the mirror plate (2) at two opposite connection points (4), the spring ring frames are connected among each other at two opposite connection points (7, 8, 13) in each case, and the outermost spring ring frame (3) adjacent to the substrate (4) is connected to the substrate (4) at two opposite connection points (6, 12). The connection points (5, 7, 8, 13, 12) between the mirror plate (2) and the innermost spring ring frame (3), between the spring ring frames (3) themselves, and between the outermost spring ring frame (3) and the substrate (4) are offset from each other.de621patent102013223937