CC BY 4.0Beyerer, JürgenChen, Chia-WeiChia-WeiChen2025-05-052025-05-052025978-3-7315-1402-2https://doi.org/10.24406/publica-4597https://publica.fraunhofer.de/handle/publica/48728210.5445/KSP/100017750410.24406/publica-4597Retroreflex ellipsometry addresses the geometric restrictions of conventional ellipsometry by using a retroreflective sheet, which returns the light beam from the sample on the same beam path. Simulation and experiments of retroreflex ellipsometry in two- and three-phase systems have been demonstrated based on the proposed concepts, which have shown the capabilities of ellipsometric measurements on nonplanar surfaces.enThin-film metrologyCurved surfacesEllipsometryMueller matrixRetroreflex ellipsometryDünnschicht- Messtechnikgekrümmte OberflächenEllipsometrieMüller-MatrixRetroreflex-Ellipsometriedoctoral thesis