Walk, ChristianChristianWalkWiemann, MatthiasMatthiasWiemannGörtz, MichaelMichaelGörtzWeidenmüller, JensJensWeidenmüllerJupe, AndreasAndreasJupeSeidl, KarstenKarstenSeidl2022-03-142022-03-142019https://publica.fraunhofer.de/handle/publica/405642Ein piezoelektrischer BIOMEMS-Sensor mit Verwendung des Flexural-Plate-Wave-Ansatzes wurde entwickelt, der die Messung von Resonanzfrequenzverschiebungen von 8 Membranen pro Sensor mittels Multiplexen vorsieht. An die zuvor mit Fängermolekülen biofunktionalisierten Membranen heften sich die Pathogene an, wodurch sich die Masse der Membran verändert. Die hier experimentell untersuchten Sensoren zeigen eine Auflösung von bis zu 14 Hz/nM Chemokin zur Identifikation des Respiratorischen Synzytial-Virus (RSV) in Pufferlösungen.A novel miniaturized multi sensor implant for monitoring hemodynamic parameters is presented. High accuracy pressure measurements are performed with a capacitive pressure sensor. Further sensors, such as acceleration and temperature sensors, allow compensating the impact of patient's inclination and temperature variations on the pressure measurement. A multi-functional transponder application-specific integrated circuit (ASIC) manages storage of ID and sensor calibration data, signal processing and telemetric energy and data transmission with an extracorporeal reading unit. Implant components are assembled on a low temperature co-fired ceramics (LTCC) circuit board which integrates an antenna coil enabling an inductive near-field coupling at a frequency of 13.56 MHz. The implant is encapsulated by biocompatible polymers for a streamlined shape and reduction of thrombogenicity.A piezoelectric flexural plate wave (FPW) BIOMEMS sensor utilizing multi resonating membranes was developed. The detection is based on the frequency shift of each membrane due to binding of an additional mass depending on functionalization treatment. The experimental results show a resolution of up to 14 Hz/nM chemokines in complex media for the detection of Respiratory Syncytial Virus (RSV).depoint of care (POC)BioMEMSflexural plate wave (FPW)piezoelectric MEMS621conference paper