Simplified resist models for efficient simulation of contact holes and line ends

Tollkühn, B.B.TollkühnErdmann, A.A.ErdmannSemmler, A.A.SemmlerNölscher, C.C.Nölscher2022-03-102022-03-102005https://publica.fraunhofer.de/handle/publica/34937110.1016/j.mee.2004.12.065en670620530Simplified resist models for efficient simulation of contact holes and line endsconference paper