Conduction mechanisms and an evidence for phonon-assisted conduction process in thin high-k Hf(x)Ti(y)Si(z)O films

Paskaleva, A.A.PaskalevaBauer, A.A.BauerLemberger, M.M.Lemberger2022-03-032022-03-032005https://publica.fraunhofer.de/handle/publica/20759310.1016/j.microrel.2004.12.018en670620530621Conduction mechanisms and an evidence for phonon-assisted conduction process in thin high-k Hf(x)Ti(y)Si(z)O filmsjournal article