An asymmetry of conduction mechanisms and charge trapping in thin high-k Hf(x)Ti(y)Si(z)O films

Paskaleva, A.A.PaskalevaBauer, A.J.A.J.BauerLemberger, M.M.Lemberger2022-03-032022-03-032005https://publica.fraunhofer.de/handle/publica/20759210.1063/1.2039270en670620530An asymmetry of conduction mechanisms and charge trapping in thin high-k Hf(x)Ti(y)Si(z)O filmsjournal article