Under CopyrightGraf, AlexanderAlexanderGrafFunke, NilsNilsFunkeHild, Olaf RĂ¼digerOlaf RĂ¼digerHild2022-03-1516.11.20212021https://publica.fraunhofer.de/handle/publica/41302010.24406/publica-fhg-413020en621Concept and first results on a miniaturized IMS chip with integrated DMS ion filter and detectorposter