Heidler, N.N.HeidlerHolub, T.T.HolubRisse, S.S.RisseEberhardt, R.R.EberhardtTünnermann, A.A.Tünnermann2022-03-112022-03-112011https://publica.fraunhofer.de/handle/publica/3753572-s2.0-84884299799The properties of porous journal gas bearing elements change, when operated under vacuum conditions. Within this paper, the experimental obtained load bearing capacity and stiffness of gas bushings are compared, using the designed setup at normal atmosphere and at vacuum. The results are essential for the development of compact, high vacuum compatible precision positioning stages.en620conference paper