Selbmann, FranzFranzSelbmannBaum, MarioMarioBaumWiemer, MaikMaikWiemerGeßner, ThomasThomasGeßner2022-03-132022-03-132016https://publica.fraunhofer.de/handle/publica/39428510.1109/NEMS.2016.77582832-s2.0-85007174632Following the recent trend of miniaturization of MEMS and the approach to improve the comfort of medical implants for patients by reducing their size the polymer Parylene is a promising candidate for encapsulation issues. Parylene combines a number of excellent properties like biocompatibility/biostability, chemical inertness, transparency and low water permeability. Within the presented work the deposition characteristics and properties like conformity, permeability of water vapor, etc. are examined.enconference paper