Nolte, StefanStefanNolteAlasgarzade, NamigNamigAlasgarzadeAlberucci, AlessandroAlessandroAlberucciBlothe, MarkusMarkusBlotheJisha, Chandroth P.Chandroth P.JishaMatthäus, GaborGaborMatthäusChambonneau, MaximeMaximeChambonneau2023-01-202023-01-202022https://publica.fraunhofer.de/handle/publica/43412610.1364/BGPPM.2022.BW2A.12-s2.0-85144194194We report on the inscription of waveguides in the bulk of crystalline silicon using infrared ultrashort laser pulses. The waveguides are characterized with respect to their structure, refractive index profile and guiding properties in detail.enSiliconUltrashort pulsesWaveguidesconference paper