Broermann, ErnstErnstBroermannPfeifer, TiloTiloPfeiferTutsch, RainerRainerTutsch2022-03-082022-03-081989https://publica.fraunhofer.de/handle/publica/317007This paper presents a classification of the interferometric methods for surface metrology. Three scanning and three imaging surface profiles are described, all of which are commercially available. Technical data are given, and some characteristic features are discussed in comparison with stylus profilers.enInterferometriemetrologyOberflächenmeßtechnikoptical measuring instrumentsOptische Meßtechniksurface roughness670658conference proceeding