Aluminium back surface field doping profiles by conventional and rapid thermal processing

Hahne, PeterPeterHahneWettling, WolframWolframWettlingSchindler, RolandRolandSchindler2022-03-092022-03-091994https://publica.fraunhofer.de/handle/publica/322199en621697Aluminium back surface field doping profiles by conventional and rapid thermal processingconference paper