Köster, O.O.KösterSchuhmann, W.W.SchuhmannVogt, H.H.VogtMokwa, W.W.Mokwa2022-03-092022-03-092000https://publica.fraunhofer.de/handle/publica/335101Miniaturised amperometric transducers have been realised on silicon wafers integrating a disk ultra-microelectrode array as working electrodes, a large counter electrode and a Ag/AgCl pseudo reference electrode in a three-electrode configuration. Cyclic voltammetry (CV), electrochemical impedance spectroscopy (EIS) and scanning electrochemical microscopy (SECM) have been evaluated as tools for rapid on-wafer determination of characteristic device parameters.enultramicroelectrode-arraycyclic voltammetryelectrochemical impedance spectroscopyscanning electron microscopythin-film transducerAbtastungarrayScheinwiderstandVoltammetrie621conference paper