Seiler, D.G.Diebold, C.Bullis, M.W.Shaffner, J.McDonald, R.Walters, E.J.2022-03-022022-03-0219981-56396-753-71-56396-867-31-56396-868-1https://publica.fraunhofer.de/handle/publica/133866Characterization and metrology for ULSI technology