Kaiser, N.N.KaiserSchallenberg, U.U.SchallenbergUhlig, H.H.Uhlig2022-03-032022-03-031994https://publica.fraunhofer.de/handle/publica/18460910.1088/0963-9659/3/4/002The design of a graded-reflectance mirror (GRM) for KrF-excimer laser has been developed. The mirror consists of three areas of reflectance: (1) a rectangular area in the middle of the substrate with a reflectance R1 about 10 per cent, (2) an outer area with a reflectance R2 about 95 per cent, and (3) a transition area with a defined reflectance increase from R1 to R2. The sandwich type was used to design the GRM with two layers of variable thicknesses and a total of 19 layers. The variable thickness based on the shadowing effect of a fixed non-contact mask with rectangular aperture. For excimer laser applications in particular, the electric field distribution inside the layer system was investigated.enDünne optische Schichtexcimer laser opticsfluoride thin filmsFluoridschichtlaser induced damage thresholdLaserzerstörschwelleoptical coatingoptical thin filmsoxide thin filmsOxidschichtultraviolet spectral regionultravioletter SpektralbereichUV620535journal article