Surface properties and electrical characteristics of rapid thermal annealed 4H-SiC

Bauer, A.J.A.J.BauerRambach, M.M.RambachFrey, L.L.FreyWeiss, R.R.WeissRupp, R.R.RuppFriedrichs, P.P.FriedrichsSchörner, R.R.SchörnerPeters, D.D.Peters2022-03-092022-03-092003https://publica.fraunhofer.de/handle/publica/342474en670620530Surface properties and electrical characteristics of rapid thermal annealed 4H-SiCconference paper