Willich, P.P.Willich2022-03-092022-03-091994https://publica.fraunhofer.de/handle/publica/323178Some microanalytical techniques (Analytical Electron Microscope, EPMA-WDS, SEM-EDS, Scanning Auger Microprobe, SIMS) are discussed with respect to their physical performance, the range of application, and aspects of practical use. Preliminary investigations by SEM-EDS are recommended to specify the microanalytical problem as far as possible with regard to the following application of more sophisticated techniques, which are in general less flexible and always more costly.encomparison of techniqueMethodenvergleichmicro analysisMikroanalyseOberflächenanalysesurface analysis667conference paper