Töpper, M.M.TöpperMund, D.D.MundLeib, J.J.Leib2022-03-102022-03-102004https://publica.fraunhofer.de/handle/publica/347112Micro structuring glass (MSG) technology is an exciting new technology, that has the potential for solving demands in microelectronic and microfluidic applications including hermetic wafer level packaging. MSG offers the following advantages; chemical resistant borosilicate glass layers, layered structuring with photo resist and high glass deposition rates at low temperatures.en621conference paper