Schubert, AndreasAndreasSchubertGroß, StefanStefanGroßEdelmann, JanJanEdelmannEckert, UdoUdoEckert2022-03-122022-03-122014https://publica.fraunhofer.de/handle/publica/3843632-s2.0-84923174831Increasing demands regarding the functionality and the functional density of micro fluidic systems require constant miniaturisation of single components and also of the complete system. A cost efficient and effective manufacturing process requires replication processes such as injection moulding or hot embossing to structure disposables cost-effectively. This paper presents the development of the sequential process combination of laser micro structuring and micro milling for the manufacturing of micro fluidic moulds.enlaser machiningmicro millingmicro fluidicsmicro manufacturingcombined processesconference paper