Fabrication of hierarchical structures by direct laser writing and multi-beam-interference

Steger, M.M.StegerHartmann, C.C.HartmannBeckemper, S.S.BeckemperHoltkamp, J.J.HoltkampGillner, A.A.Gillner2022-03-122022-03-122013https://publica.fraunhofer.de/handle/publica/383541en621Fabrication of hierarchical structures by direct laser writing and multi-beam-interferenceconference paper