Schulz, Stefan E.Stefan E.SchulzHecker, M.M.HeckerKorner, H.H.KornerWolf, H.H.Wolf2022-03-052022-03-052015https://publica.fraunhofer.de/handle/publica/24280210.1016/S0167-9317(15)00179-32-s2.0-84933567132en621Materials for Advanced Metallization 2014 (MAM 2014). Prefacejournal article