Kübel, C.C.KübelKaiser, UlrichUlrichKaiser2022-03-032022-03-032006https://publica.fraunhofer.de/handle/publica/21243610.1017/S1431927606064932en658502Electron tomographic characterization of ErSi2 and GexSi1-x nanoparticles prepared by doping of 4H-SiCjournal article