Zirconium silicate films obtained from novel MOCVD precursors

Lemberger, M.M.LembergerPaskaleva, A.A.PaskalevaZürcher, S.S.ZürcherBauer, A.J.A.J.BauerFrey, L.L.FreyRyssel, H.H.Ryssel2022-03-092022-03-092003https://publica.fraunhofer.de/handle/publica/34248310.1016/S0022-3093(03)00195-9en670620530Zirconium silicate films obtained from novel MOCVD precursorsconference paper