Sandner, T.T.SandnerBaulig, C.C.BauligGrasshoff, T.T.GrasshoffWildenhain, M.M.WildenhainSchwarzenberg, M.M.SchwarzenbergDahlmann, H.-G.H.-G.DahlmannSchwarzer, S.S.Schwarzer2022-03-122022-03-122015https://publica.fraunhofer.de/handle/publica/38851710.1117/12.2076440This paper presents a large aperture micro scanning mirror (MSM) array especially developed for the novel 3D-laser camera Fovea3D. This 3D-camera uses a pulsed ToF technique with 1MVoxel distance measuring rate and targets for a large measurement range of 30 ... 100m and FOV of 120 degrees x60 degrees at video like frame rates. To guarantee a large reception aperture of >= 20mm, large FOV and 3200 Hz bi-directional scanning frequency at the same time, a hybrid assembled MSM array was developed consisting of 22 reception mirrors and a separate sending mirror. A hybrid assembly of frequency selected scanner elements and a driving in parametric resonance were chosen to enable a fully synchronized operation of all scanner elements. For position feedback piezo-resistive position sensors are integrated on each MEMS chip. The paper discusses details of the MEMS system integration including the synchronized operation of multiple scanning elements.en621conference paper